Name: 薄層方塊電阻測(cè)量?jī)x-非接觸式
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薄層方塊電阻測(cè)量?jī)x-非接觸式

昊量光電新推出用于導(dǎo)電薄膜和薄金屬層方塊電阻測(cè)量的非接觸式薄膜四方針?lè)綁K電阻方阻測(cè)量?jī)xEddyCus TF Series，這款非接觸式薄膜四方針?lè)綁K電阻方阻測(cè)量?jī)x可以非接觸式實(shí)時(shí)測(cè)量，對(duì)導(dǎo)電薄膜和金屬方塊電阻精確測(cè)量，表征已被隱藏和封裝的導(dǎo)電層，并把測(cè)量數(shù)據(jù)保存和導(dǎo)出。可用于方塊電阻，方阻測(cè)量，四探針測(cè)試，四探針?lè)阶铚y(cè)量。

薄層方塊電阻測(cè)量?jī)x-非接觸式主要測(cè)試對(duì)象：

鍍膜建筑玻璃，如LowE
顯示器，觸摸屏和平板顯示器
OLED和LED
智能玻璃
石墨烯層
光伏晶圓和電池
半導(dǎo)體晶片
金屬化層和晶圓金屬化
電池電極
導(dǎo)電涂布紙和導(dǎo)電紡織品

非接觸式單點(diǎn)方阻測(cè)試儀EddyCus TF Lab 2020SR

EddyCus TF Lab 2020SR是非接觸式單點(diǎn)薄層電阻測(cè)量系統(tǒng)。該裝置包含一個(gè)渦流傳感器組，感應(yīng)弱電流到導(dǎo)電薄膜和材料。非接觸式薄膜四方針?lè)綁K電阻方阻測(cè)量?jī)x試樣中的感應(yīng)電流產(chǎn)生與測(cè)量對(duì)象的片電阻相關(guān)的電磁場(chǎng)。電渦流技術(shù)不依賴于表面特征或形貌。此外，非接觸式單點(diǎn)方阻測(cè)試儀不需要如已知的2或4點(diǎn)探針測(cè)試(2PP, 4PP)或霍爾效應(yīng)或范德波測(cè)量一樣進(jìn)行任何形式的充分的樣品接觸或備樣。非接觸式單點(diǎn)方阻測(cè)試儀既不需要設(shè)置測(cè)試結(jié)構(gòu)，也不受表面粗糙度或非導(dǎo)電封裝或鈍化層的影響。此外，測(cè)量不會(huì)對(duì)被測(cè)薄膜產(chǎn)生物理影響。渦流儀器不存在機(jī)械磨損，使用壽命長(zhǎng)。它的獨(dú)立性與接觸質(zhì)量和它的高速允許實(shí)現(xiàn)高重復(fù)性和準(zhǔn)確性，有利于在研發(fā)和測(cè)試實(shí)驗(yàn)室的各種薄膜的系統(tǒng)質(zhì)量保證。EddyCus工具可以由具有各種數(shù)據(jù)記錄和導(dǎo)出功能的SURAGUS軟件驅(qū)動(dòng)，也可以由SURAGUS軟件開(kāi)發(fā)套件驅(qū)動(dòng)的客戶軟件驅(qū)動(dòng)。

非接觸式單點(diǎn)方阻測(cè)試儀軟件和設(shè)備控制：

非常用戶友好的軟件
直觀的觸摸顯示導(dǎo)航
實(shí)時(shí)測(cè)量板材電阻和層厚
軟件輔助手動(dòng)映射選項(xiàng)
各種數(shù)據(jù)保存和導(dǎo)出選項(xiàng)

非接觸式薄膜四方針?lè)綁K電阻方阻測(cè)量?jī)x產(chǎn)品規(guī)格表

Measurement technology	Non-contact eddy current sensor
substrates	Foils, glass, wafer, etc.
Substrate area	8 inch / 204 mm x 204 mm (open on three sides)
Max. sample thickness / sensor gap	3 / 5 / 10 / 25 mm (defined by the thickest sample)
Thickness measurement range of metal films (e.g. copper)	2 nm – 2 mm (in accordance with sheet resistance (cf. our calculator))
Device dimensions (w/h/d)	11.4" x 5.5" x 17.5" / 290 mm x 140 mm x 445 mm
Weight	10 kg
Further available features	Sheet resistance measurement / metal thickness monitor

	VLSR	LSR	MSR	HSR	VHSR
	6 decades are measurable by one sensor, but with slightly affected accuracy
Range [Ohm/sq]	0.0001 – 0.1	0.1 – 10	0.1 – 100	10 – 2000	1,000 – 200,000
Accuracy / Bias	± 1%			± 1 – 3%	± 3 – 5%
Repeatability (2σ)	< 0.3%			< 0.5%	< 0.3%
VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistanc

非接觸式薄膜四方針?lè)綁K電阻方阻測(cè)量?jī)x

非接觸式方阻成像儀EddyCus TF Map 2530SR

EddyCus TF Map 2530SR是一種非接觸式薄層電阻映射系統(tǒng)。該設(shè)備配備了一個(gè)運(yùn)動(dòng)的渦流傳感器，每次掃描可測(cè)量高達(dá)90000 (300 x 300)測(cè)量點(diǎn)的方塊電阻。由于這種技術(shù)不需要與標(biāo)本進(jìn)行物理接觸，該設(shè)備可以在飛行運(yùn)動(dòng)中進(jìn)行測(cè)量。此外，非接觸式單點(diǎn)方阻測(cè)試儀具有很高的準(zhǔn)確性，因?yàn)樗仟?dú)立于任何接觸質(zhì)量。非接觸式薄膜四方針?lè)綁K電阻方阻測(cè)量?jī)x樣品中測(cè)量點(diǎn)的高密度確保了沒(méi)有遺漏任何效果或缺陷。此外，綜合分析功能支持生產(chǎn)和研發(fā)實(shí)驗(yàn)室中各種薄膜的系統(tǒng)質(zhì)量保證。

產(chǎn)品規(guī)格：

Measurement technology	Non-contact eddy current sensor
Substrates	Wafer, glass, foils etc.
Max. scanning area	12 inch / 300 mm x 300 mm (larger upon request)
Edge effect correction / exclusion	2 – 10 mm (depending on size, range, setup and requirements)
Max. sample thickness / sensor gap	3 / 5 / 10 / 15 mm (defined by the thickest sample)
Thickness measurement of metal films (e.g. aluminum, copper)	2 nm – 2 mm (in accordance with sheet resistance ())
Scanning pitch	1 / 2.5 / 5 / 10 / 25 mm (other upon request)
Measurement points per time (square shaped samples)	100 measurement points in 0.5 minutes 10,000 measurement points in 3 minutes
Scanning time	8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch) 12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch)
Device dimensions (w/h/d)	31.5" x 19.1" x 33.5" / 785 mm x 486 mm x 850 mm
Weight	90 kg
Further available features	Metal thickness imaging, anisotropy and sheet resistance sensor

	VLSR	LSR	MSR	HSR	VHSR
	6 decades are measurable by one sensor, but with slightly affected accuracy
Range [Ohm/sq]	0.0001 – 0.1	0.1 – 10	0.1 – 100	10 – 2,000	1,000 – 200,000
Accuracy / Bias	± 1%			± 1 – 3%	± 3 – 5%
Repeatability (2σ)	< 0.5%			< 1%	< 0.5%
VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance

便攜式方塊電阻測(cè)試儀

EddyCus TF便攜式1010SR專用于工業(yè)環(huán)境中的接觸片電阻測(cè)量。它使各種行業(yè)的手工質(zhì)量保證成為可能。

Measurement technology	Eddy current sensor
Measurement mode	Realtime at constant distance / contact
Substrates	Glass, foils etc.
Substrate sizes	Flat samples > 150 mm x 150 mm (6 inch x 6 inch) Curved editions are available for several applications (windshields etc.)
Measurement spot / high sensitivity zone	40 mm diameter (1.6 inch)
Power	Lithium ion battery up to 20 h
Sheet resistance range (five setups available)	Type very low: 0.001 – 0.1 Ohm/sq Type low: 0.04 – 0.1 Ohm/sq Type standard: 0.3 – 30 Ohm/sq Type high: 0.3 – 50 Ohm/sq Type very high: 0.3 – 100 Ohm/sq
Thickness measurement of thin films (e.g. copper)	Additional feature, available range is 5 nm – 500 µm (in accordance with sheet resistance)
Emissivity range	Additional feature, available range is 0.003 – 0.5
Accuracy (for planar solid surfaces, e.g. glass)	0.001 – 50 Ohm/sq: < 3% 50 – 100 Ohm/sq: < 5%
DISPlay	2.8 inch colored touch screen
Device dimensions (w/h/d)	3.5" x 7" x 1.9" / 87 mm x 178 mm x 48 mm
Weight	340 g
Interfaces	Bluetooth (optional) + data center

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薄層方塊電阻測(cè)量?jī)x-非接觸式

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